Dry vacuum pumps play an important role in virtually all semiconductor processes.
In a semiconductor facility, there can be thousands of such pumps to ensure that all the processes are free from pollutants. Unfortunately pumps do fail and when they do, the results can be catastrophic, resulting in substantial losses. |
Challenges >>>
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Products Used>>>
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solution >>>The pumps from the different suppliers are connected to InSerial, a controller gateway from Senwaiy. InSerial converts the different protocols of the pump suppliers to a common protocol to standardize communications among the pumps and devices.
Information from the pumps gathered by InSerial is collected by the Wonderware Application Server, the world renowned industrial software from Wonderware. An InSQL historian serves as the real-time database, collecting information from the different pumps across the facility. With InTouch, production staff can view the pumps across the facility from a central location. With the AtoServer Universal Data Integrator, information from the system can be uploaded to the FDC for analysis and process improvements. |
Overcoming the 4M challenges >>>
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Senwaiy solutions
Success Story
This success story details a project where a semiconductor facility wants to implement a centralized pump monitoring system. All the pumps in the facility are to be connected together and their operating parameters sent in real-time to a central repository. The data collected is uploaded to the FDC system for analysis to improve processes, yields and also for predictive maintenance for the pumps. Huge savings realized from the implementation of this solution offset the initial project costs and in the process, reduces the production costs.
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